��B͸��ИI(y��)�đ�(y��ng)��

��r�g��2008-01-25 11:23 ��Դ�� : ��x��2386

��Ԫ��Ҫ��Ʒ�|(zh��)�ļ�ˮ,��ˮ,��Ӽ��ˮ��Ŀǰ��ϼ��Ʒ�|(zh��)Ҫ��ߵ�ˮ.��ӹ��I(y��)�õĳ��ˮ��V��a(ch��n)Ӌ��C(j��)Ӳ�P,��·оƬ,��

��(d��o)�w��@��,��Һ��@ʾ��,��·��õļ�ˮ��ˮ�ļ��Ҫ��^��,��ˮ��ʵ�Ҫ��_(d��)��ϣ�MΩ.cm��,��

        �S��ӹ��I(y��)�İl(f��)չ��߼�ˮ��Խ��Խ�ߵ�Ҫ��,��磬��16KλDRAM��Sˮ��TOC��ЙC(j��)̼��500ppb,��x�Ӟ�1ppb,��≥0.2μm��w��100��/��16MλDRAM�r,��tҪ��TOC��5ppb,��x�ӣ�0.2ppb��ˮ��≥0.1μm�w��(sh��)��0.6��/��,��

        ��f��Ӽ��ˮ�Ƃ�ϵ�y(t��ng)�ЅR��ˮ�(d��ng)ǰˮ̎��g(sh��)��M(j��n)�Ĺ�ˇ��O(sh��)��,�糬�V,��΢�V��B͸,��ĤÓ��,��ȥ�x��(EDI)��,��з��B͸�b��ˮ��ˮ�Ƃ�ϵ�y(t��ng)��һ�P(gu��n)�I��O(sh��)��.��Ч��ȥ��ԭˮ��97%��ϵ��ܽ��ԟo�C(j��)��|(zh��),��99%��ϵ��|(zh��)��300��ЙC(j��)��,��99%��ϵİ��(x��)��ڃ�(n��i)�ĸ��N΢��95%��ϵĶ��Ȼ��.

        ��B͸��ˇ�ڼ�ˮ��ˮ�Ƃ�ϵ�y(t��ng)��еđ�(y��ng)��,��ˮa(ch��n)ˮƷ�|(zh��),��a(ch��n)�ɱ�,��ҷ�ֹ�h(hu��n)��Ⱦ,��M(j��n)��ӹ��I(y��)��M(j��n)��,ͬ�rҲ��M(j��n)�˼�ˮ,��ˮ��켼�g(sh��)�İl(f��)չ.

        ��҇�RO��(y��ng)��ӹ��I(y��)ˮ̎��Ĉ��,��׷�ݵ�1981�꣬RO��g(sh��)�ͼ��ɹ��(y��ng)��ڴ�Ҏ(gu��)ģ��·��ˮ�Ƃ�,��˺�,��F(xi��n)RO��ȡ��ˮ��ˇ��о��͸��Ҏ(gu��)ģ��ˮ�Ƃ�Ĉ��2004��4��,��Һ��ֺ��ˮ̎��g(sh��)�_�l(f��)��Ğ阷��w��޹�˾�O(sh��)Ӌ�ͽ��ɵ�13Om3/hRO��ɫ�@��܏Uˮ��Ŀ��RO��ˮ�Ƃ似�g(sh��)��ӹ��I(y��)�I(l��ng)��(y��ng)�õ��չ,��ԓ�Ŀ��҇��һ��^��Ҏ(gu��)ģ�M(j��n)�в�ɫ�@��a(ch��n)��I(y��)�Uˮ��Ŀ��

        ͨ�^��“��”,��“��”�Ƽ��P(gu��n)�Ŀ�Č�ʩ�҇��ˮ�Ƃ�ϵ�y(t��ng)��O(sh��)Ӌ�ͳ��˺ܴ��,��׹��̵�ϵ�y(t��ng)��ˇ�O(sh��)Ӌ,��O(sh��)��ͳ��ס��b�{(di��o)ԇ,��g(sh��)��Ӗ(x��n)��P(gu��n)�I��g(sh��),��̑�(y��ng)�ü��g(sh��)��_(d��)��ˇ��Hˮƽ,��

����D(zhu��n)�d��ǳ��ڂ��f��Ϣ֮Ŀ�ġ��Ё�Դ��(bi��o)ע�e�`��ַ��ĺϷ��(qu��n)��,��Ո��߳֙�(qu��n)��C��c��W(w��ng)(li��n)ϵ��҂��r��,��h��,��x�x��