Ĥ��g��Ӽ�ˮ�еđ��

��r�g��2009-12-23 11:44 ��Դ�� : ��x��1359

��ˮ��ӹ��I(y��)��Ҫ��Ԫ��a(ch��n)�е��Ҫ��ͻ��,��ˮˮ�|(zh��)�ѳɞ�Ӱ��Ԫ��a(ch��n)Ʒ�|(zh��)��a(ch��n)��Ʒ�ʼ��a(ch��n)�ɱ��Ҫ��֮һ,��ˮ�|(zh��)Ҫ��ҲԽ��Խ��,��Ԫ��a(ch��n)�У��߼�ˮ��Ҫ��ϴ��ˮ��Á��Ƹ��N��Һ,��{��,��ͬ��Ԫ��a(ch��n)�м�ˮ��;��ˮ�|(zh��)��Ҫ��Ҳ��ͬ��

��a(ch��n)��,��X��ϴ��ü�ˮ��ˮ�к��x��,��͕�©�,��ӹ��a(ch��n)�У��ӹ�ꎘOͿ��̼��},��л��s�|(zh��),��͕�Ӱ��ӵİl(f��)�䣬�M��Ӱ��ӹܵķŴ��ܼ��,��ҺҪʹ�ü�ˮ,��@��ܺ�ꎘO�侀��a(ch��n)�У��ɹ��(n��i)��Ç�Ϳ��һ�ӟɹ��|(zh��),��\��ٵ��M�ɵğɹ��w��ù��ճ�϶��,��ü�ˮ��缃ˮ�к��~��8ppb��,��͕��l(f��)��׃ɫ,��F��50ppb��Ͼ͕�ʹ�l(f��)��׃ɫ��׃��W��S,��ЙC��z�w,��΢��,��͕��͟ɹ�ӏ��ȼ��c��ճ��,��ɚ��ݡ��l�E,��©��c�ȏU��Ʒ,��ںڰ��@��ܟɹ��a(ch��n)��12��У��ϴ,��,��񝙡�ϴĤ,��i��ϴ��5��ʹ�ü�ˮ,��ÿ��a(ch��n)һ��w��ü�ˮ80kg��Һ��@ʾ��м�ˮ��ϴ��ü�ˮ��Һ,��缃ˮ�д��x��,��΢��΢��s�|(zh��),��͕�ʹҺ��@ʾ�·�l(f��)��,��Ӱ�Һ��|(zh��)��U,��Ʒ,��

��ˮ��Б��õ�Ĥ��g��Ҫ��늝B��ED��B͸��RO��,��{�V��NF��,��V��UF��΢�V��MF��,��

�c��y(t��ng)��ˮ̎��g��,��Ĥ��g��й�ˇ��Ρ��,��Ԅӿ��,��ܺ�С��o��Ⱦ,��ȥ��s�|(zh��)Ч�ʸ�,��\�гɱ��͵ȃ�(y��u)�c��؄e�ǎ׷NĤ��g��ʹ��,��o֮��(j��ng)��ˮ̎��ˇ,��ʯӢɰ��̿��Ó��,��x�ӽ��Q,��UV��ȣ��ȥ��ˮ�еĸ��N�s�|(zh��),��M��l(f��)չ��ӹ��I(y��)��߼�ˮ��Ҫ,��ṩ��Ч��ɿ��ֶΣ��Ҳֻ�Б��˶�NĤ��g,��a(ch��n)��ϸ�,��(w��n)��ĸ߼�ˮ��a(ch��n)��Ҏ(gu��)ģ,��Ҏ(gu��)ģ,��Ҏ(gu��)ģ��·��LSI��VLSI,��ULSI��,��Ķ�ʹӋ��C��_,��ͨӍ,��Ԅӿ��ƵȬF(xi��n)��ӹ��I(y��)�İl(f��)չ�͑��õ��Ԍ��F(xi��n)��

΢�Vϵ�y(t��ng)�ɷ֞��,��һ�ǰ��UF,��ROǰ�ı��^�V��֧��ˮ�еĵđҝ��΢��,��ˮ�е�SDIֵ,��Vо��PP��۱�ϩ��Ĥߡ��ʽ�Vо��׏��5μm��3μm,��ڶ��x�ӽ��Q��,��ڞV��x�ӽ��Q��֬��Ƭ��Vо��PPĤߡ��ʽ�Vо,��׏��1μm��UV��,��ڞV��΢��ʬ�w,��Vо��N-6��6��Ĥߡ��ʽ�Vо��׏��0.45μm��0.2μm,��ϞVо��˹��I(y��)��ڰ��о��a(ch��n),��

����D(zhu��n)�d��ǳ��ڂ��f��Ϣ֮Ŀ�ġ��Ё�Դ��ע�e�`��ַ��ĺϷ��,��Ո��߳֙��C��c��W(w��ng)(li��n)ϵ,��҂��r��h��x�x,��