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3 ��·�Ĺ�ˇ�U��̎��ʽ��÷��

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3.1��ԏU��̎��̼��Ì��

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3.2�A�ԏU��̎��ʽ

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3.3�ЙC�U��̎��̼��Ì��

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�D2��ĳFAB��ЙC�U��̎��̈D��ЙC�U��̎��ϵ�y(t��ng)�ɸߜ��D݆�b�úͻ��̿��b�Ø��,��ЙC�U��ͨ�^�A�^�V��,��ȥ�҉m�w��,��o��ε��O��;ͨ�^ԭ��w��,��ȥ�߷��c�ЙC��׻��һ�ͪMEA,��o�ߜ��D݆�b�Ãȵ��;ͨ�^�ӟ��,�ӟ��ЙC�U��30��,�@�ӿ��ЙC��;��ͨ�^G-AC�^�V��,�ٴ��^�Vȥ��߷��c�ЙC��U��L�C��ЙC�U��ߜ��D݆�b��M��,��ߜ��D݆�֞�ǰ��,��b��һ��D�P,�D�P��b�м��|��̿�^�V��,��ЙC�U��^�V��,��D�P�D��һ�҃�,ͨ��150��ҵğ�՚��M�н��,��ĝ�s��wͨ�^�^�V��,��ӟ��,��G-AC�^�V��O��,��s��w��L�C��w��̿��Ͳ̎��,��ŷ��ڴ��,��Ͳ�Ļ��̿ͨ�^ˮ��⼰��s�՚��Ͱ��?li��n)��ɽ��?��ˮ��⽛��׃�ɝ�sҺ��ա��OӋ��ЙC�U�⺬��,��ᶡ֬��׻��,���,�ЙC��w��Ȟ�65ppm,��ߜ��D݆�b��̎��,ƽ��ȥ��ʿ��_90%��,�ŷŵ��е��ЙC��w��С��6.5ppm,��s��w��w�e�s��ԭ�U��1/15��,��Ȟ�ԭ�U��12~13��,��̼��b��ƽ��ȥ��ʿ��_95%��ϡ��H��(sh��)��Ǽ��鿂�N�ŷŝ�Ȟ�1.55~90mg/m3,�ŷ��ʞ�0.010~0.155kg/h,��_��ŷŘ˜�,��\��̎��Ч��,��

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3.4��m�U��̎��ʽ

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3.5��ˇβ��̎��ʽ

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SiH4+O2→SiO2+2H2O

2PH3+4O2→P2O5+3H2O

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3.�،W�Y.��·��a�ЏU��Ⱦ��.��c��{��g,2006(1)19-22

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